# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2017 02 04 00 01 00 1.939e+02 3.240e+01 7.650e+00 1.962e+00 6.250e-02 2017 02 04 00 03 10 1.932e+02 3.062e+01 6.862e+00 1.675e+00 3.750e-02 2017 02 04 00 05 20 1.937e+02 3.186e+01 6.775e+00 1.800e+00 3.750e-02 2017 02 04 00 07 30 1.940e+02 3.248e+01 7.537e+00 2.087e+00 3.750e-02 2017 02 04 00 09 41 1.936e+02 3.081e+01 6.975e+00 2.062e+00 8.750e-02 2017 02 04 00 11 51 1.940e+02 3.139e+01 7.150e+00 1.863e+00 5.000e-02 2017 02 04 00 14 01 1.987e+02 3.236e+01 7.700e+00 1.975e+00 3.750e-02 2017 02 04 00 16 11 2.005e+02 3.288e+01 7.362e+00 2.038e+00 6.250e-02 2017 02 04 00 18 22 2.015e+02 3.299e+01 7.300e+00 2.225e+00 5.000e-02 2017 02 04 00 20 32 2.037e+02 3.301e+01 7.500e+00 1.837e+00 5.000e-02 2017 02 04 00 22 42 1.988e+02 3.193e+01 7.100e+00 2.125e+00 7.500e-02 2017 02 04 00 24 53 2.006e+02 3.316e+01 7.025e+00 1.825e+00 5.000e-02 2017 02 04 00 27 03 2.081e+02 3.300e+01 7.700e+00 2.288e+00 6.250e-02 2017 02 04 00 29 13 2.052e+02 3.286e+01 7.425e+00 2.125e+00 8.750e-02 2017 02 04 00 31 23 2.062e+02 3.360e+01 7.650e+00 2.362e+00 3.750e-02 2017 02 04 00 33 34 2.028e+02 3.302e+01 7.200e+00 1.788e+00 2.500e-02 2017 02 04 00 35 44 1.982e+02 3.214e+01 7.263e+00 1.812e+00 8.750e-02 2017 02 04 00 37 54 2.010e+02 3.233e+01 7.475e+00 2.325e+00 1.250e-02 2017 02 04 00 40 04 1.974e+02 3.196e+01 7.450e+00 2.188e+00 3.750e-02 2017 02 04 00 42 15 1.982e+02 3.110e+01 7.037e+00 1.913e+00 6.250e-02 2017 02 04 00 44 25 1.998e+02 3.260e+01 7.412e+00 2.150e+00 8.750e-02 2017 02 04 00 46 35 2.059e+02 3.358e+01 7.550e+00 2.188e+00 8.750e-02 2017 02 04 00 48 45 2.008e+02 3.249e+01 7.612e+00 2.312e+00 5.000e-02 2017 02 04 00 50 56 2.006e+02 3.219e+01 7.225e+00 1.938e+00 5.000e-02 2017 02 04 00 53 06 1.987e+02 3.281e+01 7.138e+00 1.925e+00 5.000e-02 2017 02 04 00 55 16 2.037e+02 3.234e+01 6.975e+00 2.000e+00 3.750e-02 2017 02 04 00 57 27 1.956e+02 3.256e+01 7.213e+00 2.450e+00 5.000e-02 2017 02 04 00 59 37 1.970e+02 3.126e+01 7.062e+00 1.725e+00 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2017 02 04 03 05 32 1.893e+02 3.048e+01 7.100e+00 2.263e+00 1.250e-02 2017 02 04 03 07 42 1.933e+02 3.050e+01 7.150e+00 1.800e+00 0.000e+00 2017 02 04 03 09 53 1.928e+02 3.085e+01 6.662e+00 2.087e+00 1.250e-02 2017 02 04 03 12 03 1.884e+02 3.016e+01 6.787e+00 2.150e+00 1.250e-02 2017 02 04 03 14 13 1.904e+02 3.169e+01 6.862e+00 1.875e+00 7.500e-02 2017 02 04 03 16 24 1.894e+02 2.999e+01 6.750e+00 1.812e+00 3.750e-02 2017 02 04 03 18 34 1.899e+02 3.099e+01 6.850e+00 1.738e+00 1.250e-02 2017 02 04 03 20 44 1.847e+02 3.090e+01 6.763e+00 1.925e+00 0.000e+00 2017 02 04 03 22 54 1.853e+02 3.052e+01 6.812e+00 1.700e+00 2.500e-02 2017 02 04 03 25 05 1.842e+02 2.993e+01 6.688e+00 1.762e+00 1.250e-02 2017 02 04 03 27 15 1.848e+02 2.956e+01 7.213e+00 2.163e+00 2.500e-02 2017 02 04 03 29 25 1.853e+02 2.998e+01 6.963e+00 1.887e+00 1.250e-02 2017 02 04 03 31 35 1.857e+02 3.007e+01 6.787e+00 2.225e+00 3.750e-02 2017 02 04 03 33 46 1.869e+02 3.000e+01 6.463e+00 1.812e+00 6.250e-02 2017 02 04 03 35 56 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