# yy mm dd HH MM SS      0.3um      0.5um        1um        2um        5um
2016 10 18 11 40 44  1.223e+03  8.609e+01  1.344e+01  3.225e+00  1.250e-02
2016 10 18 11 42 54  1.264e+03  8.958e+01  1.405e+01  3.663e+00  5.000e-02
2016 10 18 11 45 04  1.224e+03  8.446e+01  1.326e+01  3.400e+00  3.750e-02
2016 10 18 11 47 15  1.181e+03  8.144e+01  1.269e+01  3.325e+00  2.500e-02
2016 10 18 11 49 25  1.234e+03  8.640e+01  1.324e+01  3.425e+00  0.000e+00
2016 10 18 11 51 35  1.248e+03  8.667e+01  1.389e+01  3.562e+00  5.000e-02
2016 10 18 11 53 45  1.193e+03  7.947e+01  1.338e+01  3.188e+00  2.500e-02
2016 10 18 11 55 56  1.142e+03  7.804e+01  1.359e+01  3.388e+00  1.250e-02
2016 10 18 11 58 06  1.103e+03  7.262e+01  1.303e+01  3.712e+00  1.250e-02
2016 10 18 12 00 16  7.814e+02  5.506e+01  1.159e+01  3.312e+00  1.250e-02
2016 10 18 12 02 26  7.665e+02  5.338e+01  1.260e+01  3.288e+00  6.250e-02
2016 10 18 12 04 37  6.228e+02  4.498e+01  1.103e+01  3.100e+00  1.250e-02