# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2016 06 25 00 00 34 9.260e+02 6.865e+01 1.004e+01 2.538e+00 6.250e-02 2016 06 25 00 02 44 9.054e+02 6.483e+01 1.005e+01 2.475e+00 2.500e-02 2016 06 25 00 04 55 9.110e+02 6.484e+01 9.400e+00 2.375e+00 0.000e+00 2016 06 25 00 07 05 9.177e+02 6.510e+01 9.938e+00 2.550e+00 2.500e-02 2016 06 25 00 09 15 9.460e+02 6.588e+01 9.238e+00 2.388e+00 2.500e-02 2016 06 25 00 11 25 9.938e+02 7.055e+01 9.500e+00 2.462e+00 2.500e-02 2016 06 25 00 13 36 1.071e+03 8.022e+01 1.029e+01 2.700e+00 0.000e+00 2016 06 25 00 15 46 1.074e+03 7.861e+01 1.007e+01 2.487e+00 7.500e-02 2016 06 25 00 17 56 1.146e+03 8.406e+01 9.650e+00 2.225e+00 2.500e-02 2016 06 25 00 20 07 1.136e+03 8.151e+01 9.875e+00 2.200e+00 3.750e-02 2016 06 25 00 22 17 1.095e+03 7.830e+01 9.300e+00 2.500e+00 1.250e-02 2016 06 25 00 24 27 1.019e+03 6.716e+01 8.850e+00 2.275e+00 3.750e-02 2016 06 25 00 26 37 1.025e+03 6.891e+01 8.363e+00 2.513e+00 1.250e-02 2016 06 25 00 28 48 1.064e+03 7.511e+01 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6.487e+00 3.750e-02 2016 06 25 09 48 57 4.737e+02 8.378e+01 2.420e+01 6.513e+00 7.500e-02 2016 06 25 09 51 08 4.847e+02 8.350e+01 2.427e+01 6.300e+00 1.000e-01 2016 06 25 09 53 18 5.009e+02 8.451e+01 2.418e+01 6.513e+00 6.250e-02 2016 06 25 09 55 28 5.104e+02 8.621e+01 2.484e+01 6.525e+00 5.000e-02 2016 06 25 09 57 38 5.074e+02 8.116e+01 2.184e+01 5.812e+00 1.250e-02 2016 06 25 09 59 49 5.124e+02 7.766e+01 2.195e+01 5.925e+00 3.750e-02 2016 06 25 10 01 59 5.128e+02 7.606e+01 2.049e+01 5.200e+00 3.750e-02 2016 06 25 10 04 09 5.187e+02 7.436e+01 2.062e+01 5.425e+00 5.000e-02 2016 06 25 10 06 19 5.158e+02 6.931e+01 1.929e+01 5.025e+00 2.500e-02 2016 06 25 10 08 30 5.237e+02 6.981e+01 1.788e+01 4.350e+00 7.500e-02 2016 06 25 10 10 40 5.383e+02 7.808e+01 2.086e+01 5.662e+00 5.000e-02 2016 06 25 10 12 50 5.598e+02 8.165e+01 2.155e+01 5.425e+00 3.750e-02 2016 06 25 10 15 01 5.854e+02 9.088e+01 2.430e+01 5.812e+00 1.250e-02 2016 06 25 10 17 11 5.947e+02 8.841e+01 2.302e+01 5.575e+00 1.250e-02 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