# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2016 06 08 00 00 38 1.071e+03 8.140e+01 1.122e+01 2.688e+00 0.000e+00 2016 06 08 00 02 48 1.056e+03 7.956e+01 1.085e+01 2.987e+00 1.250e-02 2016 06 08 00 04 59 1.020e+03 7.480e+01 9.825e+00 2.788e+00 2.500e-02 2016 06 08 00 07 09 1.016e+03 7.392e+01 9.887e+00 2.725e+00 1.250e-02 2016 06 08 00 09 19 9.812e+02 7.030e+01 9.725e+00 2.750e+00 2.500e-02 2016 06 08 00 11 29 1.011e+03 7.409e+01 1.051e+01 2.788e+00 1.250e-02 2016 06 08 00 13 40 1.054e+03 7.776e+01 9.812e+00 3.050e+00 2.500e-02 2016 06 08 00 15 50 1.084e+03 8.346e+01 1.143e+01 3.062e+00 2.500e-02 2016 06 08 00 18 00 1.078e+03 8.292e+01 1.068e+01 2.888e+00 3.750e-02 2016 06 08 00 20 11 1.092e+03 8.339e+01 1.071e+01 2.862e+00 5.000e-02 2016 06 08 00 22 21 1.150e+03 9.279e+01 1.354e+01 3.388e+00 2.500e-02 2016 06 08 00 24 31 1.139e+03 9.009e+01 1.272e+01 3.275e+00 3.750e-02 2016 06 08 00 26 41 1.152e+03 8.924e+01 1.309e+01 3.550e+00 3.750e-02 2016 06 08 00 28 52 1.164e+03 9.054e+01 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5.461e+02 5.055e+01 1.205e+01 3.225e+00 2.500e-02 2016 06 08 21 43 19 5.546e+02 5.308e+01 1.225e+01 3.188e+00 2.500e-02 2016 06 08 21 45 30 5.312e+02 4.994e+01 1.150e+01 2.850e+00 2.500e-02 2016 06 08 21 47 40 5.279e+02 4.859e+01 1.134e+01 3.075e+00 6.250e-02 2016 06 08 21 49 50 5.201e+02 4.706e+01 1.089e+01 3.138e+00 0.000e+00 2016 06 08 21 52 01 4.729e+02 4.259e+01 1.025e+01 2.750e+00 1.250e-02 2016 06 08 21 54 11 4.881e+02 4.488e+01 1.081e+01 3.025e+00 1.250e-02 2016 06 08 21 56 21 4.267e+02 3.727e+01 8.900e+00 2.312e+00 3.750e-02 2016 06 08 21 58 31 4.596e+02 4.154e+01 9.537e+00 2.487e+00 0.000e+00 2016 06 08 22 00 42 4.238e+02 3.623e+01 8.312e+00 2.188e+00 0.000e+00 2016 06 08 22 02 52 4.298e+02 3.615e+01 8.613e+00 2.350e+00 0.000e+00 2016 06 08 22 05 02 3.928e+02 3.349e+01 8.125e+00 2.288e+00 0.000e+00 2016 06 08 22 07 12 3.963e+02 3.356e+01 8.213e+00 2.275e+00 1.250e-02 2016 06 08 22 09 23 4.152e+02 3.586e+01 8.525e+00 2.487e+00 0.000e+00 2016 06 08 22 11 33 4.098e+02 3.321e+01 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