# yy mm dd HH MM SS 0.3um 0.5um 1um 2um 5um 2016 04 06 00 02 01 1.141e+03 9.054e+01 1.952e+01 6.425e+00 1.000e-01 2016 04 06 00 04 11 1.086e+03 8.899e+01 1.999e+01 6.513e+00 6.250e-02 2016 04 06 00 06 21 1.081e+03 8.722e+01 1.998e+01 6.662e+00 1.250e-01 2016 04 06 00 08 32 1.090e+03 8.625e+01 1.885e+01 6.600e+00 8.750e-02 2016 04 06 00 10 42 1.096e+03 8.940e+01 2.025e+01 6.650e+00 1.000e-01 2016 04 06 00 12 52 1.100e+03 8.916e+01 1.979e+01 6.487e+00 1.250e-01 2016 04 06 00 15 02 1.139e+03 9.129e+01 2.043e+01 6.713e+00 1.125e-01 2016 04 06 00 17 13 1.184e+03 9.347e+01 2.151e+01 7.325e+00 1.500e-01 2016 04 06 00 19 23 1.204e+03 9.194e+01 2.045e+01 6.713e+00 1.250e-01 2016 04 06 00 21 33 1.175e+03 9.185e+01 2.159e+01 7.662e+00 2.000e-01 2016 04 06 00 23 43 1.167e+03 8.919e+01 1.975e+01 6.688e+00 1.625e-01 2016 04 06 00 25 54 1.144e+03 9.274e+01 2.238e+01 7.575e+00 1.000e-01 2016 04 06 00 28 04 1.178e+03 9.478e+01 2.160e+01 7.675e+00 2.000e-01 2016 04 06 00 30 14 1.210e+03 9.665e+01 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2016 04 06 03 06 34 1.073e+03 8.999e+01 2.186e+01 7.612e+00 6.250e-02 2016 04 06 03 08 44 1.008e+03 8.769e+01 2.215e+01 7.425e+00 3.750e-02 2016 04 06 03 10 54 1.151e+03 9.647e+01 2.160e+01 7.325e+00 1.250e-01 2016 04 06 03 13 04 1.296e+03 1.011e+02 2.131e+01 6.888e+00 8.750e-02 2016 04 06 03 15 15 1.340e+03 1.078e+02 2.195e+01 6.650e+00 1.000e-01 2016 04 06 03 17 25 1.339e+03 1.083e+02 2.125e+01 6.675e+00 1.000e-01 2016 04 06 03 19 35 1.368e+03 1.086e+02 2.261e+01 7.713e+00 1.375e-01 2016 04 06 03 21 45 1.348e+03 1.055e+02 2.132e+01 6.588e+00 6.250e-02 2016 04 06 03 23 56 1.351e+03 1.076e+02 2.220e+01 7.100e+00 7.500e-02 2016 04 06 03 26 06 1.337e+03 1.080e+02 2.226e+01 6.975e+00 7.500e-02 2016 04 06 03 28 16 1.349e+03 1.098e+02 2.184e+01 7.050e+00 5.000e-02 2016 04 06 03 30 27 1.347e+03 1.105e+02 2.135e+01 7.225e+00 6.250e-02 2016 04 06 03 32 37 1.378e+03 1.096e+02 2.139e+01 7.362e+00 6.250e-02 2016 04 06 03 34 47 1.391e+03 1.105e+02 2.066e+01 6.912e+00 1.000e-01 2016 04 06 03 36 57 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