# yy mm dd HH MM SS      0.3um      0.5um        1um        2um        5um
2015 09 11 16 39 54  1.870e+02  1.996e+01  3.425e+00  4.375e-01  0.000e+00
2015 09 11 16 42 04  1.908e+02  1.971e+01  3.138e+00  4.125e-01  1.250e-02
2015 09 11 16 44 14  1.857e+02  1.726e+01  3.038e+00  4.750e-01  1.250e-02
2015 09 11 16 46 24  1.888e+02  1.819e+01  3.263e+00  5.500e-01  3.750e-02
2015 09 11 16 48 35  1.885e+02  1.809e+01  3.337e+00  6.000e-01  6.250e-02
2015 09 11 16 50 45  1.844e+02  1.743e+01  2.837e+00  3.875e-01  3.750e-02
2015 09 11 16 52 55  1.722e+02  1.807e+01  3.150e+00  4.750e-01  1.250e-02
2015 09 11 16 55 06  1.627e+02  1.651e+01  3.112e+00  5.625e-01  3.750e-02
2015 09 11 16 57 16  1.397e+02  1.456e+01  2.737e+00  3.875e-01  2.500e-02
2015 09 11 16 59 26  1.268e+02  1.384e+01  2.725e+00  2.250e-01  0.000e+00