# yy mm dd HH MM SS      0.3um      0.5um        1um        2um        5um
2014 07 18 22 47 36  2.447e+03  2.216e+02  1.311e+01  3.300e+00  1.000e-01
2014 07 18 22 49 46  2.345e+03  2.065e+02  1.259e+01  2.962e+00  8.750e-02
2014 07 18 22 51 57  2.051e+03  1.715e+02  1.239e+01  3.100e+00  2.500e-02
2014 07 18 22 54 07  1.936e+03  1.573e+02  1.210e+01  3.150e+00  2.500e-02
2014 07 18 22 56 17  1.915e+03  1.536e+02  1.169e+01  3.000e+00  3.750e-02
2014 07 18 22 58 27  1.793e+03  1.415e+02  1.093e+01  2.700e+00  3.750e-02
2014 07 18 23 00 38  1.768e+03  1.406e+02  1.156e+01  2.587e+00  3.750e-02
2014 07 18 23 02 48  1.733e+03  1.366e+02  1.041e+01  2.425e+00  2.500e-02
2014 07 18 23 04 58  1.704e+03  1.343e+02  1.095e+01  2.750e+00  8.750e-02
2014 07 18 23 07 09  1.692e+03  1.316e+02  1.096e+01  2.862e+00  6.250e-02
2014 07 18 23 09 19  1.656e+03  1.271e+02  1.115e+01  3.225e+00  0.000e+00